Predictive data analytics and machine learning enabling metrology and process control for advanced node IC fabrication
- Narender Rana
- Yunlin Zhang
- et al.
- 2015
- ASMC 2015
Conference paper
Publications
6 results for Yunlin Zhang
Machine learning and predictive data analytics enabling metrology and process control in IC fabrication
- Narender Rana
- Yunlin Zhang
- et al.
- 2015
- SPIE Advanced Lithography 2015
Conference paperLeveraging advanced data analytics, machine learning, and metrology models to enable critical dimension metrology solutions for advanced integrated circuit nodes
- Narender Rana
- Yunlin Zhang
- et al.
- 2014
- J. Micro/Nanolithogr. MEMS MOEMS
PaperMultitechnique metrology methods for evaluating pitch walking in 14 nm and beyond FinFETs
- Robin Chao
- Kriti K. Kohli
- et al.
- 2014
- J. Micro/Nanolithogr. MEMS MOEMS
PaperLeveraging data analytics, patterning simulations and metrology models to enhance CD metrology accuracy for advanced IC nodes
- Narender Rana
- Yunlin Zhang
- et al.
- 2014
- SPIE Advanced Lithography 2014
Conference paperNovel in-line metrology methods for Fin pitch walking monitoring in 14nm node and beyond
- Robin Chao
- Kriti Kohli
- et al.
- 2014
- SPIE Advanced Lithography 2014
Conference paper