Growth of nanostructures by locally modified surface reactivity
- A. Portavoce
- M. Kammler
- et al.
- 2009
- Materials Science in Semiconductor Processing
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150 results for Matthew Copel
Au stabilization and coverage of sawtooth facets on Si nanowires grown by vapor-liquid-solid epitaxy
- Christian Wiethoff
- Frances M. Ross
- et al.
- 2008
- Nano Letters
Effects of film reoxidation on the growth and material properties of ultrathin dielectrics grown by rapid thermal nitridation in ammonia
- C. D'Emic
- J.S. Newbury
- et al.
- 2008
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Reaction of barium oxide threshold voltage tuning layers with Si O2 and Hf O2 Si O2 gate dielectrics
- M. Copel
- 2008
- Applied Physics Letters
Post deposition annealing of Hf aluminate films on Si investigated by ion backscattering and nuclear reaction analyses
- L. Miotti
- R.P. Pezzi
- et al.
- 2008
- Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Control of homoepitaxial Si nanostructures by locally modified surface reactivity
- A. Portavoce
- R. Hull
- et al.
- 2008
- Applied Physics Letters
Advanced ion energy loss models: Applications to subnanometric resolution elemental depth profiling
- R.P. Pezzi
- P.L. Grande
- et al.
- 2007
- Surface Science
Single-crystalline Germanium thin films by electrodeposition and solid-phase epitaxy
- Q. Huang
- S.W. Bedell
- et al.
- 2007
- Electrochemical and Solid-State Letters
Recent advances and current challenges in the search for high mobility band-edge high-k/metal gate stacks
- V. Narayanan
- V.K. Paruchuri
- et al.
- 2007
- Microelectronic Engineering
Evidence for segregation of Te in Ge2 Sb2 Te5 films: Effect on the "phase-change" stress
- L. Krusin-Elbaum
- C. Cabral
- et al.
- 2007
- Applied Physics Letters