Publications

3 results for Xiaohu Tang

The merits of high landing energy for E-beam inspection
- - Oliver D. Patterson
  - Richard Hafer
  - et al.
- 2015
- ASMC 2015
E-beam inspection throughput acceleration via Targeted Critical Area Inspection
- - Oliver D. Patterson
  - Rasit O Topaloglu
  - et al.
- 2015
- ASMC 2015
Detection of sub-design rule physical defects using E-beam inspection
- - Oliver D. Patterson
  - Julie Lee
  - et al.
- 2013
- IEEE Trans Semicond Manuf