The efficacy of post porosity plasma protection against vacuum-ultraviolet damage in porous low-k materials
- Krystelle Lionti
- M. Darnon
- et al.
- 2015
- Journal of Applied Physics
Publications
7 results for M. Darnon
Toward successful integration of porous low-k materials: Strategies addressing plasma damage
- Krystelle Lionti
- Willi Volksen
- et al.
- 2014
- ECS J. Solid State Sci. Technol.
Investigation of plasma etch damage to porous oxycarbosilane ultra low-k dielectric
- Robert Bruce
- Sebastian Engelmann
- et al.
- 2013
- Journal of Physics D: Applied Physics
Impact of low-k structure and porosity on etch processes
- Maxime Darnon
- Nicolas Casiez
- et al.
- 2012
- Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Integration of a manufacturing grade, k = 2.0 spin-on material in a single damascene structure
- Willi Volksen
- Sampath Purushothaman
- et al.
- 2012
- ECS J. Solid State Sci. Technol.
Hydrogen silsesquioxane-based hybrid electron beam and optical lithography for high density circuit prototyping
- M. Guillorn
- J. Chang
- et al.
- 2009
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Trigate 6T SRAM scaling to 0.06 μm2
- M. Guillorn
- J. Chang
- et al.
- 2009
- IEDM 2009