Application of E-beam hot spot inspection for early detection of systematic patterning problems to a FinFET technology
- Deborah A. Ryan
- Oliver D. Patterson
- et al.
- 2015
- J. Micro/Nanolithogr. MEMS MOEMS
Paper
Publications
4 results for Deborah A. Ryan
E-beam hot spot inspection for early detection of systematic patterning problems for a 22 nm SOI technology
- Oliver D. Patterson
- Deborah A. Ryan
- et al.
- 2014
- IEEE Trans Semicond Manuf
PaperEarly detection of systematic patterning problems for a 22nm SOI technology using E-beam hot spot inspection
- Oliver D. Patterson
- Deborah A. Ryan
- et al.
- 2013
- ASMC 2013
Conference paperHigh performance 65 nm SOI technology with dual stress liner and low capacitance SRAM cell
- E. Leobandung
- H. Nayakama
- et al.
- 2005
- VLSI Technology 2005
Conference paper