Publications

2 results for Oded Cohen

Advanced in-line optical metrology of sub-10nm structures for gate all around devices (GAA)
- - R. Muthinti
  - Nicolas Loubet
  - et al.
- 2016
- SPIE Advanced Lithography 2016
Scatterometry-based defect detection for DSA in-line process control
- - Robin Chao
  - Chi Chun Liu
  - et al.
- 2015
- SPIE Advanced Lithography 2015