Publications

4 results for Steven Boettcher

Leveraging sub-E0 dose assessment methodology to improve EUV lithography cluster dose performance
- - Chris Robinson
  - Cody Murray
  - et al.
- 2020
- SPIE Advanced Lithography 2020
Conference paper
Imaging at high beam energies in the scanning electron microscope
- - L. Gignac
  - S.H. Boettcher
  - et al.
- 2006
- M&M 2006
Conference paper
Imaging and analysis of subsurface Cu interconnects by detecting backscattered electrons in the scanning electron microscope
- - L. Gignac
  - M. Kawasaki
  - et al.
- 2005
- Journal of Applied Physics
Paper
Mechanisms for very long electromigration lifetime in dual-damascene Cu interconnections
- - C.-K. Hu
  - L. Gignac
  - et al.
- 2001
- Applied Physics Letters
Paper