Publications

2 results for Parul Dhagat

Design technology co-optimization assessment for directed self-Assembly-based lithography: Design for directed self-Assembly or directed self-Assembly for design
- - Kafai Lai
  - Chi Chun Liu
  - et al.
- 2017
- J. Micro/Nanolithogr. MEMS MOEMS
Modeling and parameter tuning for templated directed self-Assembly
- - Balint Meliorisz
  - T. Mülders
  - et al.
- 2016
- SPIE Advanced Lithography 2016