Publications

33 results for John M. Cotte

Evaluation of o₂ plasma and xef₂ vapor etch release processes for rf-mems switches fabricated using cmos interconnect technology
- - Christopher V. Jahnes
  - Nils Hoivik
  - et al.
- 2006
- TRANSDUCERS 2006
Analysis and modeling of curvature in copper-based mems structures fabricated using CMOS interconnect technology
- - Marie-Ange Eyoum
  - Nils Hoivik
  - et al.
- 2005
- TRANSDUCERS 2005
Simultaneous fabrication of RF MEMS switches and resonators using copper-based CMOS interconnect manufacturing methods
- - C.V. Jahnes
  - J.M. Cotte
  - et al.
- 2004
- MEMS 2004
Fabrication challenges for next-generation devices: Microelectromechanical systems for radio-frequency wireless communications
- - David Seeger
  - Jennifer Lund
  - et al.
- 2003
- Journal of Microlithography, Microfabrication and Microsystems
Fabrication challenges for next generation devices: MEMS for RF wireless communications
- - David Seeger
  - Jennifer Lund
  - et al.
- 2002
- Proceedings of SPIE - The International Society for Optical Engineering
Pb-free solder alloys for flip chip applications
- - S.K. Kang
  - J. Horkans
  - et al.
- 1999
- ECTC 1999
Subatmospheric chemical vapor deposition ozone/TEOS process for SiO₂ trench filling
- - I.A. Shareef
  - G.W. Rubloff
  - et al.
- 1995
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Optimization of SiGe HBT Technology for High Speed Analog and Mixed-Signal Applications
- - D.L. Harame
  - J.M.C. Stork
  - et al.
- 1993
- IEDM 1993
Ge segregation in SiGe/Si heterostructures and its dependence on deposition technique and growth atmosphere
- - D.A. Grützmacher
  - T.O. Sedgwick
  - et al.
- 1993
- Applied Physics Letters
Diffusion of elements implanted in amorphous titanium disilicide
- - F.M. d'Heurle
  - J.M. Cotte
  - et al.
- 1993
- Applied Surface Science