Infrared laser interferometric thermometry: Extension to batch processing environments
- K.L. Saenger
- 1995
- Review of Scientific Instruments
Publications
Date
Featured collections
Popular topics
97 results for Katherine Saenger
A kinetic study of the C49 to C54 TiSi2 conversion using electrical resistivity measurements on single narrow lines
- K.L. Saenger
- C. Cabral
- et al.
- 1995
- Journal of Applied Physics
A comparison of C54-TiSi2 formation in blanket and submicron gate structures using in situ x-ray diffraction during rapid thermal annealing
- J. Bucchignano
- G.B. Stephenson
- et al.
- 1995
- Journal of Materials Research
In situ x-ray diffraction analysis of the C49-C54 titanium silicide phase transformation in narrow lines
- R.A. Roy
- L. Clevenger
- et al.
- 1995
- Applied Physics Letters
Extremely high electron mobility in Si/SiGe modulation-doped heterostructures
- K. Ismail
- M. Arafa
- et al.
- 1995
- Applied Physics Letters
Study of C49-TiSi2 and C54-TiSi2 formation on doped polycrystalline silicon using in situ resistance measurements during annealing
- L. Clevenger
- R. Mann
- et al.
- 1994
- Journal of Applied Physics
Picosecond optical studies of amorphous diamond and diamondlike carbon: Thermal conductivity and longitudinal sound velocity
- Christopher J. Morath
- Humphrey J. Maris
- et al.
- 1994
- Journal of Applied Physics
Modulation-doped n-type Si/SiGe with inverted interface
- K. Ismail
- J.O. Chu
- et al.
- 1994
- Applied Physics Letters
Thickness‐direction thermal expansion of polyimide films
- Ho-Ming Tong
- K.L. Saenger
- et al.
- 1993
- Polymer Engineering & Science
Characterization of laser vaporization plasmas generated for the deposition of diamond-like carbon
- David L. Pappas
- Katherine L. Saenger
- et al.
- 1992
- Journal of Applied Physics