Lowering the formation temperature of the C54-TiSi2 phase using a metallic interfacial layer
- C. Cabral Jr.
- L. Clevenger
- et al.
- 1997
- Journal of Materials Research
Publications
97 results for Katherine Saenger
Diamondlike carbon materials as low-k dielectrics for multilevel interconnects in ULSI
- A. Grill
- V.V. Patel
- et al.
- 1996
- MRS Fall Meeting 1996
In-situ X-ray diffraction analysis of TiSi2 phase formation from a titanium-molybdenum bilayer
- C. Cabral Jr.
- L. Clevenger
- et al.
- 1996
- MRS Fall Meeting 1996
Infrared laser interferometric thermometry: Extension to batch processing environments
- K.L. Saenger
- 1995
- Review of Scientific Instruments
Investigation of titanium silicide formation in Ti+Si reactions using infrared spectroscopy and x-ray diffraction
- K.L. Saenger
- C. Cabral Jr.
- et al.
- 1995
- Journal of Applied Physics
In situ analysis of the formation of thin TiSi2 (<50 nm) contacts in submicron CMOS structures during rapid thermal annealing
- L. Clevenger
- C. Cabral Jr.
- et al.
- 1995
- MRS Fall Meeting 1995
Light scattering measurement of surface topography during formation of titanium silicide
- C. Lavoie
- C. Cabral Jr.
- et al.
- 1995
- MRS Fall Meeting 1995
A kinetic study of the C49 to C54 TiSi2 conversion using electrical resistivity measurements on single narrow lines
- K.L. Saenger
- C. Cabral
- et al.
- 1995
- Journal of Applied Physics
In situ x-ray diffraction analysis of the C49-C54 titanium silicide phase transformation in narrow lines
- R.A. Roy
- L. Clevenger
- et al.
- 1995
- Applied Physics Letters
Extremely high electron mobility in Si/SiGe modulation-doped heterostructures
- K. Ismail
- M. Arafa
- et al.
- 1995
- Applied Physics Letters