Strained-silicon / silicon-germanium-on-insulator for high-performance CMOS : A manufacturable process for 300 mm substratesA. ReznicekS.W. Bedellet al.2004ECS Meeting 2004
On the integration of CMOS with hybrid crystal orientationsM. YangV. Chanet al.2004VLSI Technology 2004
Channel design and mobility enhancement in strained germanium buried channel MOSFETsH. ShangJ.O. Chuet al.2004VLSI Technology 2004
Strain relaxation and threading dislocation density in helium-implanted and annealed Si 1-xGe x/Si( 100) heterostructuresJ. CaiP.M. Mooneyet al.2004Journal of Applied Physics
Coulomb blockade in a silicon/silicon-germanium two-dimensional electron gas quantum dotL.J. KleinK.A. Slinkeret al.2004Applied Physics Letters
Influence of He implantation conditions on strain relaxation and threading dislocation density in Si0.8Ge0.2 virtual substratesJ. CaiP.M. Mooneyet al.2004MRS Proceedings 2004
Fabrication and Mobility Characteristics of Ultra-thin Strained Si Directly on Insulator (SSDOI) MOSFETsK. RimK.K. Chanet al.2003IEDM 2003
Threshold voltage control in NiSi-gated MOSFETs through silicidation induced impurity segregation (SIIS)Jakub KedzierskiDiane Boydet al.2003IEDM 2003
High Performance CMOS Fabricated on Hybrid Substrate with Different Crystal OrientationsM. YangM. Ieonget al.2003IEDM 2003