Publications

6 results for Stefan Schoeche

In-cycle evolution of thickness and roughness parameters during oxygen plasma enhanced ZnO atomic layer deposition using in situ spectroscopic ellipsometry
- - Yousra Traouli
  - Ufuk Kilic
  - et al.
- 2024
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Development of Epitaxial SiGeB as a Test Vehicle to Evaluate Source-Drain Etchout during Channel Release of Gate-all-Around Devices: Topic/category: AEPM: Advanced Equipment Processes and Materials
- - M. Nasseri
  - C. Durfee
  - et al.
- 2024
- ASMC 2024
Conference paper
TSV Stress Evolution Mapping using in-line Raman Spectroscopy
- - Stefan Schoeche
  - Daniel Schmidt
  - et al.
- 2023
- SPIE Advanced Lithography + Patterning 2023
Conference paper
Broadband mid-infrared resonances in aligned carbon nanotube films
- - John Andris Roberts
  - Po Hsun Ho
  - et al.
- 2020
- CLEO_QELS 2020
Conference paper
Mid-infrared Hyperbolic Plasmons in Aligned Carbon Nanotube Metamaterials
- - Shang Jie Yu
  - John Andris Roberts
  - et al.
- 2019
- NOMA 2019
Conference paper
Tunable Hyperbolic Plasmons in Self-Assembled Carbon Nanotube Metamaterials
- - John Andris Roberts
  - Shang Jie Yu
  - et al.
- 2019
- CLEO 2019
Conference paper