Direct Liquid Injection − Low Pressure Chemical Vapor Deposition of Silica Thin Films from Di-t-butoxydiacetoxysilane
- Mattias Vervaele
- Bert De Roo
- et al.
- 2017
- Advanced Engineering Materials
Paper
Publications
3 results for Markku Rajala
A Novel Direct Liquid Injection Low Pressure Chemical Vapor Deposition System (DLI-LPCVD) for the Deposition of Thin Films
- Mattias Vervaele
- Bert De Roo
- et al.
- 2017
- Advanced Engineering Materials
PaperDevelopment of a new direct liquid injection system for nanoparticle deposition by chemical vapor deposition using nanoparticle solutions
- Mattias Vervaele
- Bert De Roo
- et al.
- 2016
- Review of Scientific Instruments
Paper