Direct Liquid Injection − Low Pressure Chemical Vapor Deposition of Silica Thin Films from Di-t-butoxydiacetoxysilane
- Mattias Vervaele
- Bert De Roo
- et al.
- 2017
- Advanced Engineering Materials
Publications
3 results for Luman Zhang
A Novel Direct Liquid Injection Low Pressure Chemical Vapor Deposition System (DLI-LPCVD) for the Deposition of Thin Films
- Mattias Vervaele
- Bert De Roo
- et al.
- 2017
- Advanced Engineering Materials
Production of VO2 thin films through post-deposition annealing of V2O3 and VOx films
- Bart Van Bilzen
- P. Homm
- et al.
- 2015
- Thin Solid Films