Direct Liquid Injection − Low Pressure Chemical Vapor Deposition of Silica Thin Films from Di-t-butoxydiacetoxysilaneMattias VervaeleBert De Rooet al.2017Advanced Engineering Materials
A Novel Direct Liquid Injection Low Pressure Chemical Vapor Deposition System (DLI-LPCVD) for the Deposition of Thin FilmsMattias VervaeleBert De Rooet al.2017Advanced Engineering Materials
Development of a new direct liquid injection system for nanoparticle deposition by chemical vapor deposition using nanoparticle solutionsMattias VervaeleBert De Rooet al.2016Review of Scientific Instruments