Publications

2 results for Peter Ventzek

Future of plasma etching for microelectronics: Challenges and opportunities
- - Gottlieb S. Oehrlein
  - Stephan M. Brandstadter
  - et al.
- 2024
- Journal of Vacuum Science and Technology B
Guiding gate-etch process development using 3D surface reaction modeling for 7nm and beyond
- - Derren Dunn
  - John R. Sporre
  - et al.
- 2017
- SPIE Advanced Lithography 2017