Silicon photonics and challenges for fabrication
- N. Feilchenfeld
- Karen Nummy
- et al.
- 2017
- SPIE Advanced Lithography 2017
Conference paper
Publications
4 results for C. Yu
Post implant strip optimization for 90nm and beyond technologies
- Nicholas C. M. Fuller
- Anthony Santiago
- et al.
- 2006
- ASMC 2006
Conference paperTrimming of hard-masks by gaseous chemical oxide removal (COR) for sub-10nm gates/fins, for gate length control and for embedded logic
- Wesley C. Natzle
- David Horak
- et al.
- 2004
- ASMC 2004
Conference paperNew polysilicon disposable sidewall process for sub-50 nm CMOS
- K.L. Lee
- D. Boyd
- et al.
- 2001
- ESSDERC 2001
Conference paper