Publications

2 results for Haigou Huang

CMP: Consideration of stop-on selectivity in advanced node semiconductor manufacturing technology
- - Stan Tsai
  - Hari Amanapu
  - et al.
- 2017
- ECS Meeting 2017 - New Orleans
CMP Challenges for Advanced Technology Nodes
- - John H Zhang
  - Haigou Huang
  - et al.
- 2017
- MRS Advances