Tailoring capping layers to reduce stress gradients in copper metallization
- Conal E. Murray
- Deepika Priyadarshini
- et al.
- 2016
- Applied Physics Letters
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13 results for Deepika Priyadarshini
Linking strain anisotropy and plasticity in copper metallization
- Conal E. Murray
- Jean L. Jordan-Sweet
- et al.
- 2015
- Applied Physics Letters
Progress in the development and understanding of advanced low k and ultralow k dielectrics for very large-scale integrated interconnects - State of the art
- Alfred Grill
- Stephen M. Gates
- et al.
- 2014
- Applied Physics Reviews