Publications

2 results for E. Levrau

Highly-selective superconformai CVD Ti silicide process enabling area-enhanced contacts for next-generation CMOS architectures
- - Nicolas Breil
  - A. Carr
  - et al.
- 2017
- VLSI Technology 2017
Contacts in advanced CMOS: History and emerging challenges
- - Christian Lavoie
  - Praneet Adusumilli
  - et al.
- 2017
- ECS Meeting 2017 - New Orleans