Novel Advanced Low-k Dielectric for 2 nm and Beyond Cu and Post Cu Dual Damascene BEOL Interconnect Technologies
- S. Nguyen
- H. Huang
- et al.
- 2025
- VLSI Technology and Circuits 2025
Publications
6 results for Colleen Meagher
Wet clean oxidation for optimal line width and LER
- Steven McDermott
- Keith Donegan
- et al.
- 2025
- SPIE Advanced Lithography 2025
Monolithically integrated silicon nitride platform
- Yusheng Bian
- Colleen Meagher
- et al.
- 2021
- OFC 2021
Monolithically integrated silicon nitride platform
- Yusheng Bian
- Colleen Meagher
- et al.
- 2021
- OFC 2021
Controlling optical return loss in production silicon photonic metamaterial fiber couplers
- Bo Peng
- Tymon Barwicz
- et al.
- 2021
- Optics Letters
A CMOS Compatible Monolithic Fiber Attach Solution with Reliable Performance and Self-Alignment
- Bo Peng
- Tymon Barwicz
- et al.
- 2020
- OFC 2020