Publications

148 results for Thomas M. Shaw

Effects of photoinduced carrier injection on time-dependent dielectric breakdown
- - J.M. Atkin
  - R.B. Laibowitz
  - et al.
- 2009
- IRPS 2009
Endurance improvement of Ge₂Sb₂Te₅-based phase change memory
- - Chieh-Fang Chen
  - A.G. Schrott
  - et al.
- 2009
- IMW 2009
Ionized-PVD stacked barrier structure of TaN/TaRu for 32nm BEOL integration
- - Takeshi Nogami
  - Chih-Chao Yang
  - et al.
- 2008
- ADMETA 2008
Material and process for advanced Cu/ULK integration
- - Chih-Chao Yang
  - Daniel C. Edelstein
  - et al.
- 2008
- ADMETA 2008
Advanced bilayer low-k dielectric cap for reliable high performance Cu-low k interconnects
- - Griselda Bonilla
  - Lawrence A. Clevenger
  - et al.
- 2008
- ADMETA 2008
The evolution of optical and electrical properties of low-k dielectrics under bias stress
- - J.M. Atkin
  - E. Cartier
  - et al.
- 2009
- Microelectronic Engineering
Charge trapping at the low- k dielectric-silicon interface probed by the conductance and capacitance techniques
- - J.M. Atkin
  - E. Cartier
  - et al.
- 2008
- Applied Physics Letters
Photocurrent spectroscopy of low- k dielectric materials: Barrier heights and trap densities
- - J.M. Atkin
  - D. Song
  - et al.
- 2008
- Journal of Applied Physics
Chip package interaction in ultra low-k/copper interconnect technology
- - X.-H. Liu
  - T.M. Shaw
  - et al.
- 2007
- ICEPT 2007
Chip-package-interaction modeling of ultra low-k/copper back end of line
- - X.-H. Liu
  - T.M. Shaw
  - et al.
- 2007
- IITC 2007