Publications

148 results for Thomas M. Shaw

Moisture and oxygen uptake in Low K/ copper interconnect structures
- - T.M. Shaw
  - D. Jimerson
  - et al.
- 2003
- ADMETA 2003
The effect of current density, stripe length, stripe width, and temperature on resistance saturation during electromigration testing
- - R. Filippi
  - R.A. Wachnik
  - et al.
- 2002
- Journal of Applied Physics
The effect of forming gas annealing on Pt/(Ba,Sr)TiO₃/Pt thin film capacitors for future dram applications: Electrical properties and degradation mechanisms
- - J.D. Baniecki
  - C. Parks
  - et al.
- 2001
- MRS Online Proceedings Library
Hydrogen induced tunnel emission in Pt/(BaxSr_1-x)Ti_1+yO_3+z/Pt thin film capacitors
- - J.D. Baniecki
  - R.B. Laibowitz
  - et al.
- 2001
- Journal of Applied Physics
Bottom electrode effects in controlling orientation of lead zirconate titanate films deposited by chemical solution deposition
- - Deborah A. Neumayer
  - Katherine L. Saenger
  - et al.
- 1999
- MRS Proceedings 1999
Low temperature hydrogen induced degradation of (Ba,Sr)TiO₃ thin film capacitors
- - J.D. Baniecki
  - C. Parks
  - et al.
- 1999
- MRS Proceedings 1999
A high performance 0.13 μm copper BEOL technology with low-k dielectric
- - R.D. Goldblatt
  - B.N. Agarwala
  - et al.
- 2000
- IITC 2000
Properties of ferroelectric films at small dimensions
- - T.M. Shaw
  - S. Trolier-McKinstry
  - et al.
- 2000
- Annual Review of Materials Science
The effect of stress on the dielectric properties of barium strontium titanate thin films
- - T.M. Shaw
  - Z. Suo
  - et al.
- 1999
- Applied Physics Letters
Effects of annealing conditions on charge loss mechanisms in MOCVD Ba_0·7Sr_0·3TiO₃ thin film capacitors
- - J.D. Baniecki
  - R.B. Laibowitz
  - et al.
- 1999
- Journal of the European Ceramic Society