Publications

68 results for Terry A. Spooner

Segment removal strategy in SAQP for advanced BEOL application
- - James H.-C. Chen
  - Terry A. Spooner
  - et al.
- 2017
- IITC 2017
Methods to lower the resistivity of ruthenium interconnects at 7 nm node and beyond
- - Xunyuan Zhang
  - Huai Huang
  - et al.
- 2017
- IITC 2017
CMOS compatible MIM decoupling capacitor with reliable sub-nm EOT high-k stacks for the 7 nm node and beyond
- - Takashi Ando
  - Eduard Cartier
  - et al.
- 2016
- IEDM 2016
Via resistance reduction in advanced copper interconnects
- - Chih-Chao Yang
  - Terry A. Spooner
  - et al.
- 2017
- IEEE Electron Device Letters
Pre-liner dielectric nitridation for resistance reduction in copper interconnects
- - Chih-Chao Yang
  - Terry A. Spooner
  - et al.
- 2016
- IITC/AMC 2016
Post porosity plasma protection integration at 48 nm pitch
- - H. Huang
  - Krystelle Lionti
  - et al.
- 2016
- IITC/AMC 2016
Experimental study of nanoscale Co damascene BEOL interconnect structures
- - James Kelly
  - James H.-C. Chen
  - et al.
- 2016
- IITC/AMC 2016
BEOL process integration for the 7 nm technology node
- - T. Standaert
  - Genevieve Beique
  - et al.
- 2016
- IITC/AMC 2016
Ruthenium interconnect resistivity and reliability at 48 nm pitch
- - Xunyuan Zhang
  - Huai Huang
  - et al.
- 2016
- IITC/AMC 2016
Ultrathin conformal multilayer SiNO dielectric cap for capacitance reduction in Cu/low k interconnects
- - Deepika Priyadarshini
  - Son Van Nguyen
  - et al.
- 2016
- IITC/AMC 2016