Etch selectivity of 4SiMA: Hydroxystyrene based copolymers. silicon chemistry for bilayer resist systems
- G.M. Wallraff
- Carl E. Larson
- et al.
- 1998
- J. Photopolym. Sci. Tech.
Publications
44 results for M.H. Sherwood
Toughened, inorganic-organic hybrid materials for microelectronic application
- J.L. Hedrick
- S.A. Srinivasan
- et al.
- 1996
- MRS Fall Meeting 1996
Conformational Behavior of the Spacer in a Liquid Crystalline Main-Chain Polymer in its Nematic and Glassy States
- J. Leisen
- C. Boeffel
- et al.
- 1995
- Macromolecules
Molecular order in the nematic melt of a semiflexible polyether by deuteron nmr
- M.H. Sherwood
- G. Sigaud
- et al.
- 1994
- Molecular Crystals and Liquid Crystals Science and Technology. Section A. Molecular Crystals and Liquid Crystals