Publications

3 results for Ashim Dutta

Novel Advanced Low-k Dielectric for 2 nm and Beyond Cu and Post Cu Dual Damascene BEOL Interconnect Technologies
- - Son Nguyen
  - Huai Huang
  - et al.
- 2025
- VLSI Technology and Circuits 2025
Scatterometry based methodologies for characterization of MRAM technology
- - Manasa Medikonda
  - Daniel Schmidt
  - et al.
- 2022
- SPIE Advanced Lithography 2022
Exploration of pillar local CDU improvement options for AI applications
- - Charlie Liu
  - Hao Tang
  - et al.
- 2020
- SPIE Advanced Lithography 2020