23 results for
Dan Dechene- Nicholas A. Lanzillo
- Albert M. Chu
- et al.
- 2021
- IEEE T-ED
Paper
Conference paper
Conference paper
- Nicholas A. Lanzillo
- Rwik Sengupta
- et al.
- 2020
- IITC 2020
Conference paper
- J. Zhang
- S. Pancharatnam
- et al.
- 2019
- IEDM 2019
Conference paper
- Ruqiang Bao
- Reinaldo A. Vega
- et al.
- 2019
- IEDM 2019
Conference paper
- Nicholas A. Lanzillo
- P. Bhosale
- et al.
- 2019
- Journal of Physics D: Applied Physics
Paper
- Kafai Lai
- Melih Ozlem
- et al.
- 2014
- SPIE Advanced Lithography 2014
Conference paper
- Dan J. Dechene
- Abdallah Shami
- 2014
- IEEE TMC
Paper
- A.E. Zweber
- A.E. McGuire
- et al.
- 2013
- SPIE Photomask Technology 2013
Conference paper