Publications

2 results for Michelle Hofman

Fully Encapsulated Fine Pitch Dual Damascene Organic RDL with Low Dk Df Photosensitive Polyimide and Its Reliability
- - Minhua Lu
  - Joyce Liu
  - et al.
- 2025
- ECTC 2025
High resolution patterning of positive resist for semi-additive process
- - Elizabeth A. Duch
  - Minhua Lu
  - et al.
- 2025
- SPIE Advanced Lithography + Patterning 2025