Semiconductor SEM Image Defect Classification Using Supervised and Semi-Supervised Learning with Vision Transformers (Topic/category: Defect Inspection and Reduction)
- Chien-Fu Huang
- Katherine Sieg
- et al.
- 2025
- ASMC 2025
Publications
2 results for Chien-Fu Huang
Process and Tool Monitoring Strategy for Advanced Magnetic Tunnel Junction Stack Deposition
- Gabriel Rodriguez
- Oscar Van Der Straten
- et al.
- 2024
- ASMC 2024