Publications

2 results for Benjamin D. Naab-Rafael

Advanced EUV CAR small molecule compounds design and its impact to etch performance
- - Yinjie Cen
  - Jong Keun Park
  - et al.
- 2024
- SPIE Advanced Lithography 2024
Impact of increasing EUV absorption of CAR polymers on lithographic performance
- - Yinjie Cen
  - Emad Aqad
  - et al.
- 2024
- SPIE Advanced Lithography 2024