Advanced Multi-Vt Enabled by Selective Layer Reductions for 2nm Nanosheet Technology and Beyond
- Ruqiang Bao
- Yusuke Oniki
- et al.
- 2024
- IEDM 2024
Conference paper
Publications
2 results for Alma Vela Ramirez
Wet Etch Recipe Optimization for Enabling RMG Multi Vt Scheme
- Alma Vela Ramirez
- Sankar Sankarapandian
- et al.
- 2024
- ASMC 2024
Conference paper