Publications

2 results for Steven Gueci

High Volume Manufacturing Innovations for Metal-Oxide Resist Patterning
- - Nicholas Latham
  - Jennifer Church
  - et al.
- 2025
- SPIE Advanced Lithography + Patterning 2025
AI-Powered Process Optimization for EUV MOR: Equipment Trace Data Feature Extraction and Machine Learning is Essential for CD Control
- - Mario Faria
  - Francis Ortega
  - et al.
- 2024
- ASMC 2024