ON THE DETERMINATION OF SHARP DOPING PROFILES.
- Subramanian S. Iyer
- Frederick G. Allen
- 1984
- ECS Meeting 1984
Publications
3 results for Frederick G. Allen
DOPANT INCORPORATION PROCESSES IN SILICON GROWN BY MOLECULAR BEAM EPITAXY.
- Subramanian S. Iyer
- Robert A. Metzger
- et al.
- 1983
- VLSI Science and Technology 1983
DOPANT INCORPORATION PROCESSES IN SILICON GROWN BY MOLECULAR BEAM EPITAXY.
- Subramanian S. Iyer
- Robert A. Metzger
- et al.
- 1983
- ECS Meeting 1983