Publications

3 results for Akiko Kai

The defect mitigation on EUV stack by track based technology
- - Naoki Shibata
  - Lior Huli
  - et al.
- 2019
- SPIE Advanced Lithography 2019
Conference paper
Defect detection strategies and process partitioning for single-expose EUV patterning
- - Luciana Meli
  - Karen Petrillo
  - et al.
- 2019
- J. Micro/Nanolithogr. MEMS MOEMS
Paper
Defect detection strategies and process partitioning for SE EUV patterning
- - Luciana Meli
  - Karen Petrillo
  - et al.
- 2018
- SPIE Advanced Lithography 2018
Conference paper