Publications

2 results for Franz Zach

Approach to pattern aspect ratio control
- - A. Thomas
  - Franz Zach
  - et al.
- 1999
- SPIE Advanced Lithography 1999
Conference paper
Selection of attenuated phase shift mask compatible contact hole resists for KrF optical lithography
- - Zhijian G. Lu
  - Yuping Cui
  - et al.
- 1999
- SPIE Advances in Resist Technology and Processing 1999
Conference paper