Publications

2 results for Eugene A. Mash

Acid-catalyzed dehydration for the design of chemical amplification resists
- - Hiroshi Ito
  - R. Sooriyakumaran
  - et al.
- 1991
- ACS Spring 1991
Negative chemical amplification resist systems based on polyhydroxystyrenes and N-substituted imides or aldehydes
- - Hiroshi Ito
  - Klaas Schildknegt
  - et al.
- 1991
- Microlithography 1991