Publications

3 results for Gregory M. Waliraff

Base-catalyzed photosensitive polyimide
- - Dennis R. McKean
  - Gregory M. Waliraff
  - et al.
- 1993
- Microlithography 1993
Acid-catalyzed single-layer resists for ArF lithography
- - Roderick R. Kunz
  - Robert D. Allen
  - et al.
- 1993
- Microlithography 1993
New chemistry in the i)esign of chemically amplified positive resists
- - Robert D. Allen
  - Quan P. Ly
  - et al.
- 1993
- Microlithography 1993