Publications

3 results for J. Tracy Weed

Optimization of resolution-enhanced photolithography for a 256Mb DRAM cell
- - R. Ferguson
  - Christopher P. Ausschnitt
  - et al.
- 1994
- VLSI Technology 1994
Application of the Aerial Image Measurement System (AIMSTM) to the Analysis of Binary Mask Imaging and Resolution Enhancement Techniques
- - R. Martino
  - R. Ferguson
  - et al.
- 1994
- Microlithography 1994
A comprehensive evaluation of major phase shift mask technologies for isolated gate sinictuies in logic designs
- - Lars W. Liebmann
  - Thomas H. Newman
  - et al.
- 1994
- Microlithography 1994