Publications

2 results for Kenji Ishikawa

Future of plasma etching for microelectronics: Challenges and opportunities
- - Gottlieb S. Oehrlein
  - Stephan M. Brandstadter
  - et al.
- 2024
- Journal of Vacuum Science and Technology B
Rethinking surface reactions in nanoscale dry processes toward atomic precision and beyond: A physics and chemistry perspective
- - Kenji Ishikawa
  - Tatsuo Ishijima
  - et al.
- 2019
- Japanese Journal of Applied Physics