Publications

3 results for Katherine Luedders

28P L/S Dry Resist Process Flow Co-optimization at Low NA EUV
- - Chun-chia Brown Lu
  - Saumya Gulati
  - et al.
- 2025
- ANS 2025
Novel Advanced Low-k Dielectric for 2 nm and Beyond Cu and Post Cu Dual Damascene BEOL Interconnect Technologies
- - Son Nguyen
  - Huai Huang
  - et al.
- 2025
- VLSI Technology and Circuits 2025
Backside power distribution for nanosheet technologies beyond 2nm
- - Ruilong Xie
  - Wonhyuk Hong
  - et al.
- 2024
- VLSI Technology and Circuits 2024