Publications

5 results for Matt Malley

NanoStack Transistor Architecture for CMOS 7A Node and Beyond
- - Shay Reboh
  - Chen Zhang
  - et al.
- 2025
- VLSI Technology and Circuits 2025
AFM Assisted Hybrid Bonding Interface Optimization
- - Nick Polomoff
  - Jennifer Fullam
  - et al.
- 2025
- SPIE Advanced Lithography + Patterning 2025
Monolithic Stacked FET with Stepped Channels for Future Logic Technologies
- - Chen Zhang
  - Seungmin Song
  - et al.
- 2024
- IEDM 2024
Backside power distribution for nanosheet technologies beyond 2nm
- - Ruilong Xie
  - Wonhyuk Hong
  - et al.
- 2024
- VLSI Technology and Circuits 2024
Metal Corrosion Mitigation in Fine Geometries during Chemical Mechanical Planarization
- - Wei-Tsu Tseng
  - Emiko Motoyama
  - et al.
- 2024
- ECS Spring Meeting 2024