Publications

2 results for Rosemary Longo

Approach to pattern aspect ratio control
- - A. Thomas
  - Franz Zach
  - et al.
- 1999
- SPIE Advanced Lithography 1999
Conference paper
Evaluation of X-ray lithography using a 0.175 μm (0.245 μm² cell area) 1 Gb DRAM technology
- - Rosemary Longo
  - S. Chaloux
  - et al.
- 1998
- VLSI Technology 1998
Conference paper