Measurement of thermal stress and stress relaxation in confined metal lines. II. Stress relaxation study
- M.A. Moske
- P.S. Ho
- et al.
- 1993
- Journal of Applied Physics
Paper
Publications
4 results for M.A. Moske
Measurement of thermal stress and stress relaxation in confined metal lines. I. Stresses during thermal cycling
- M.A. Moske
- P.S. Ho
- et al.
- 1993
- Journal of Applied Physics
PaperElectromigration and stress reliability in multilevel interconnect metallization
- Paul S. Ho
- M.A. Moske
- et al.
- 1992
- SPIE Microelectronic Processing 1992
Conference paperStress behavior during thermal cycling in metal-polyimide layered films
- M.A. Moske
- J.E. Lewis
- et al.
- 1991
- ANTEC Annual Technical Conference 1991
Conference paper