Publications

3 results for Kohji Hashimoto

Electrical characterization of across-field lithographic performance for 256m bit dram technologies
- - Junichiro Iba
  - Kohji Hashimoto
  - et al.
- 1995
- SPIE Photomask Japan 1995
Optimization of resolution-enhanced photolithography for a 256Mb DRAM cell
- - R. Ferguson
  - Christopher P. Ausschnitt
  - et al.
- 1994
- VLSI Technology 1994
The application of deep UV phase shifted-single layer halftone reticles to 256 mbit dynamic random access memory cell patterns
- - Kohji Hashimoto
  - Donald J. Samuels
  - et al.
- 1994
- Japanese Journal of Applied Physics