Publications

3 results for Mark A. Hartney

193 nm resists and lithography
- - Roderick R. Kunz
  - Robert D. Allen
  - et al.
- 1994
- Polymers for Advanced Technologies
Comparison of liquid- And vapor-phase silylation processes for 193-nm positive-tone lithography
- - Mark A. Hartney
  - Roderick R. Kunz
  - et al.
- 1993
- Microlithography 1993
Silicon oxidation during bilayer resist etching
- - Mark A. Hartney
  - Justin N. Chiang
  - et al.
- 1989
- Proceedings of SPIE 1989