Characterization of electron beam induced modification of thermally grown SiO2J.R. BarnesA.C.F. Hooleet al.1995Applied Physics LettersPaper
Doping profiling with scanning surface harmonic microscopyM. JohnsonJ.P. Bourgoinet al.1995Microelectronic EngineeringPaper
Semiconductor characterization with the scanning surface harmonic microscopeJ.P. BourgoinM. Johnsonet al.1994Applied Physics LettersPaper