Publications

2 results for T. Matsuda

CVD of fluorosilicate glass for ULSI applications
- - M.J. Shapiro
  - S. Nguyen
  - et al.
- 1995
- Thin Solid Films
Paper
Advanced metallization technology for 256M DRAM
- - P. Kücher
  - H. Aochi
  - et al.
- 1995
- Applied Surface Science
Paper