Stoichiometry reversal and depth-profiling in the growth of thin oxynitride films with N2O on Si(100) surfaces
- D.G.J. Sutherland
- H. Akatsu
- et al.
- 1996
- Journal of Electron Spectroscopy and Related Phenomena
Publications
3 results for W.M. Tong
Surface and interface analysis at 3rd generation light sources
- F.J. Himpsel
- H. Akatsu
- et al.
- 1995
- Progress in Surface Science
Stoichiometry reversal in the growth of thin oxynitride films on Si(100) surfaces
- D.G.J. Sutherland
- H. Akatsu
- et al.
- 1995
- Journal of Applied Physics