Publications

2 results for H.-J. Timme

High pressure oxidation induced stress in submicron trench structures
- - R. Stengl
  - H.-J. Timme
  - et al.
- 1996
- Applied Physics Letters
Effects of surface oxide on the rapid thermal nitridation of Si(001)
- - M. Copel
  - R.M. Tromp
  - et al.
- 1996
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films